Spectroscopic ellipsometry and reflectometry

Spectroscopic ellipsometry and reflectometry: a user's guide

by Tompkins, Harland G.

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Title Statements

  • Full title :Spectroscopic ellipsometry and reflectometry : a user's guide / Harland G. Tompkins ; William A. McGahan.

Edition Statements

  • Publication Date:1999.

Publication Statements

  • Publisher(s):Wiley
  • Place of Publication:New York, NY
  • Language:eng
  • Publication Date:1999.

Notes

Literaturangaben.

The Physical Object

  • Description:XI, 228 Seiten : : Diagramme ; : 24 cm

Edition Identifiers

  • ISBN:0471181722, 9780471181729
  • oclc:ocn246064298
  • LC Classification:QC443
  • Dewey Decimal:681.25

Subjects

Ellipsometrie -- Anwendung Ellipsometrie ; SWD-ID: 41520257 Ellipsometry Material ; SWD-ID: 41690783 Materials Oberflächeneigenschaft ; SWD-ID: 421922… Optische Eigenschaft ; SWD-ID: 41238874 Reflectometer Reflektometrie -- Anwendung Reflektometrie ; SWD-ID: 42967594 Surfaces (Technology) Thin films

Writers

Tompkins, Harland G. McGahan, William A.

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