Spectroscopic ellipsometry and reflectometry

Spectroscopic ellipsometry and reflectometry: a user's guide

by Tompkins, Harland G.

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Title Statements

  • Full title :Spectroscopic ellipsometry and reflectometry : a user's guide / Harland G. Tompkins, William A. McGahan.

Edition Statements

  • Publication Date:1999.

Publication Statements

  • Publisher(s):Wiley
  • Place of Publication:New York
  • Language:eng
  • Publication Date:1999.

The Physical Object

  • Description:XV, 228 p.

Edition Identifiers

  • ISBN:0471181722, 9780471181729
  • oclc:ocn807650455

Subjects

El·lipsometria Instruments òptics Materials Pel·lícules fines Propietats òptiques Superficies (Tecnología)

Writers

Tompkins, Harland G. McGahan, William A.

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