Ultraclean technology handbook

Ultraclean technology handbook

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Title Statements

  • Full title :Ultraclean technology handbook / ed. by Tadahiro Ohmi.

Edition Statements

  • Publication Date:1993.

Publication Statements

  • Publisher(s):Dekker
  • Place of Publication:New York
  • Language:eng
  • Publication Date:1993.

The Physical Object

  • Description:XVI, 928 Seiten : : Illustrationen, Diagramme.

Edition Identifiers

  • ISBN:0824787536, 9780824787530
  • oclc:ocn311748756

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