VLSI electronics microstructure science

VLSI electronics microstructure science: a treatise

by Einspruch, Norman G.

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Title Statements

  • Full title :VLSI electronics microstructure science : a treatise / ed. by Norman G. Einspruch

Edition Statements

  • Publication Date:1983

Publication Statements

  • Publisher(s):Academ. Press
  • Place of Publication:Orlando, Fla. ˜[u.a.]œ
  • Language:eng
  • Publication Date:1983

The Physical Object

  • Description:XII, 601 S. : Ill., graph. Darst.

Edition Identifiers

  • ISBN:0122341066, 9780122341069
  • oclc:ocn180162862

Writers

Einspruch, Norman G.

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  • Materials and process characterization -- (.pdf)

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