Demands for high-performance micro/nano manipulations, from the manufacture of microelectronic and photonic devices, biomedical apparatus, nanoscience and nanotechnology, renewable energy, environment protection, and high-end appliances, have been rapidly increasing in recent ye…
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This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particula…
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and des…