Beginning with a comprehensive survey of existing semiconductor-based chemical microsensors and microsystems, this book proceeds to describe in detail CMOS technology-based chemical microsensor systems. The benefits of using CMOS-technology for developing chemical microsensor sy…
"This book, "Integrated Chemical Microsensor Systems in CMOS Technology," provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at scientists and engineers who are interested in gaining an introduction to th…
Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which resear…
