Capacitive silicon resonators: performance enhancement methods
"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators…
Read More ↓Title Statements
- Full title :Capacitive silicon resonators : performance enhancement methods / Nguyen Van Toan and Takahito Ono.
Summary
"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"--
Read More ↓Edition Statements
- Publication Date:2020
Publication Statements
- Publisher(s):CRC Press/Taylor & Francis Group
- Place of Publication:Boca Raton, FL
- Language:eng
- Publication Date:2020
The Physical Object
- Description:xiii, 161 pages ; : 24 cm
Edition Identifiers
- ISBN:9780367217761, 0367217767
- oclc:on1089225968
- LC Classification:TK7872.D53
- Dewey Decimal:621.3815
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