Developments in surface contamination and cleaning: cleanliness validation and verification

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography.

Front Cover; Developments in Surface Contamination and Cleaning: Cleanliness Validation and Verification; Copyright; Contents; Contributors; Preface; About the Editors; Chapter 1: Sources and Generation of Surface Contaminants and Their Impact; 1. Introduction; 2. Surface Cleanliness Levels; 3. Sources and Generation of Contaminants; 3.1. Particles; 3.2. Thin Film or Molecular Contamination; 3.3. Ionic Contamination; 3.4. Microbial Contamination; 4. Impact of Contaminants; 4.1. Particle Contamination; 4.1.1. Health Effects; 4.2. Molecular Contamination; 4.3. Ionic Contamination.

4.4. Microbial Contamination5. Summary and Conclusions; Acknowledgments; Disclaimer; References; Chapter 2: Mid-IR Spectroscopy as a Tool for Cleanliness Validation; 1. Background; 2. Principles of Grazing-Angle FTIR; 3. Description of the Method; 4. Advantages and Disadvantages; 4.1. Direct, Real-Time Method; 4.2. Detect Anything With An IR Spectrum; 4.3. Automation; 4.4. Access to Small Spaces/Flat Surfaces; 5. Results and Applications; 5.1. Aerospace; 5.2. Manufacturing; 5.3. Pharmaceutical Applications; 5.4. Explosives and Chemical Warfare Agents; 5.5. Tank Trials.

5.6. IRRAS by Direct Reflectance6. …