Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology

by Asundi, Anand

Type Book
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Title Statements

  • Full title :Digital holography for MEMS and microsystem metrology / ed. by Anand Asundi.

Edition Statements

  • Publication Date:2011.

Publication Statements

  • Publisher(s):John Wiley
  • Place of Publication:Chichester
  • Language:eng
  • Publication Date:2011.

The Physical Object

  • Description:205 Seiten : : Illustrationen.

Edition Identifiers

  • ISBN:9780470978696, 0470978694, 9781119997306, 1119997305, 9781119997290, 1119997291, 9781119972785, 1119972787, 9781119972792, 1119972795
  • oclc:ocn774146145
  • LC Classification:TK7875
  • Dewey Decimal:621.381

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