Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology

by Cayırcı, Erdal

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Title Statements

  • Full title :Digital holography for MEMS and microsystem metrology / edited by Erdal Cayirci.

Edition Statements

  • Publication Date:2011.

Publication Statements

  • Publisher(s):Wiley-Blackwell
  • Place of Publication:Oxford
  • Language:eng
  • Publication Date:2011.

The Physical Object

  • Description:1 v. ; : 24 cm.

Edition Identifiers

  • ISBN:9780470978696, 0470978694
  • oclc:ocn753226946
  • LC Classification:TK7875
  • Dewey Decimal:620.1127

Subjects

digital imaging Essais holographiques Holographic testing Holographie Image processing -- Digital techniques MEMS Microelectromechanical systems -- Measu… Microelectronics -- Measurement Nanostrukturiertes Material Traitement d'images -- Techniques numér… Werkstoffprüfung

Writers

Cayırcı, Erdal

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