Introduction to Nanoscience and Nanotechnology explains nanotechnology to an audience that does not necessarily have a scientific background. It covers all aspects, including the new areas of biomedical applications and the use of nanotechnology to probe the "quantum vacuum." Af…
1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Pr…
The book has 12 chapters dealing with the following topics: performance characteristics of sensors and actuators; temperature sensors and thermal actuators; optical sensors and actuators; electric and magnetic sensors; mechanical sensors; acoustic sensors; chemical sensors; radi…
The book has 12 chapters dealing with the following topics: performance characteristics of sensors and actuators; temperature sensors and thermal actuators; optical sensors and actuators; electric and magnetic sensors; mechanical sensors; acoustic sensors; chemical sensors; radi…
"This book introduces students to the basic physical principles to analyze fluid flow in micro and nano-size devices. This is the first book that unifies the thermal sciences with electrostatics and electrokinetics and colloid science; electrochemistry; and molecular biology. Th…