The research topics of the dissertation involve the design and the acoustic response prediction of MEMS silicon microphones. A directional microphone and an omnidirectional microphone were designed to meet the performance targets such as the desired sensitivity, frequency respon…
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A novel differential microphone design has been proposed by Miles et al. based on the ears of the fly Ormia ochracea . An important aspect of the overall package design for this microphone is the design of a cover to protect the microphone diaphragm from the effects of dust and …
The development of micromachining technologies has provided wide applications in micro sensing and actuation. However, most of the demonstrated devices are selectively constructed by fabrication processes that are limited to complexity, configuration, dimension, and material var…
Silicon technologies have been the foundation building blocks of integrated digital and analog electronic circuits for almost four decades. Complementary Metal Oxide Semiconductor (CMOS) is an important silicon technology that is being used to create MicroElectroMechanical syste…
In this dissertation, we study the impact of the common imperfections encountered in micromachined clamped-clamped beams, bridges, on their static and dynamic behavior. These include flexible supports, capillary forces, and initial curvature due to residual stresses. The last ef…
The design and development of a second order MEMS sound pressure gradient sensor is presented in this dissertation. Inspired by the directional hearing ability of the parasitoid fly, Ormia ochracea, a novel first order directional microphone that mimics the mechanical structure …
The first objective of this dissertation is to present hybrid numerical-analytical approaches and reduced-order models to simulate microelectromechanical systems (MEMS) in multi-physics fields. These include electric actuation (AC and DC), squeeze-film damping, thermoelastic dam…