Fadi M. Alsaleem

This dissertation presents an investigation into dynamic instabilities and bifurcations in MEMS devices actuated electrostatically and their use to achieve new methods and functionalities for mass and acceleration sensing and detection. These instabilities are induced into a MEM…

A MEMS device can be exposed to shock loads during fabrication, assembly process, while transporting, and in service. Short circuits, stiction, and fracture are common problems caused by mechanical shock, which lead to failure of MEMS devices. A rigorous analysis of the response…