Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measur…
This book provides a unified treatment of all Micro Electro Mechanical System (MEMS) design procedures. The chapters answer important questions such as: What fabrication process do I use? Will this design approach produce a device that can be reliable and have a good yield? What…
by Uhlmann, Eckart, Celis, Jean-Pierre, Cowan, Richard S., Fischer, Alfons, Gradt, Thomas, Groche, Peter, Kleinlein, Erich, Knoll, Gunter, Mang, Theo, Santner, Erich, Sturm, Heinz, Talke, Frank E., Winer, Ward O., Woydt, Mathias
The modeling of micromechanical systems (MEMS) under shock conditions can be an extremely difficult task for MEMS engineers. Overall, this field of research is multiphasic nature, since different physical phenomena are strongly intertwined at microscale. This work concentrates o…
We developed a novel large-stroke deformable mirror for focus control and spherical aberration correction. The mirrors fabricated using MEMS technology provide full range (150-200 μm in tissue) of focus scanning at high numerical aperture (N.A.=0.5-0.7) for confocal microscopy a…
Scope and Method of Study. Described is an uncooled surface-micromachined thermoelectric (TE) infrared detector that features P-doped polysilicon/Nichrome (Cr20-Ni80) as the thermocouple material pair embedded in Parylene-N, which isolates the hot junction from the substrate. Si…
This dissertation presents an investigation of the static and dynamic behavior of microbeams and shallow arches excited electrostatically near their higher resonance modes. In the first part of the dissertation, we study the effect of partial electrode on the static and dynamic …
Controlling mechanical systems is an important branch of mechanical engineering. In this thesis, we will study the effect of delayed feedback controller on stabilizing MEMS resonators. Firstly, we apply a delayed feedback velocity controller on a MEMS resonator which is actuated…
MEMS-scale vibration energy harvesters have gained attention as an energy source for low-power electronics. A great deal of research focuses on increasing power generation. This paper proposes a band-pass filter for improved bandwidth and mounting a MEMS energy harvester on a pr…
Microelectromechanical systems (MEMS) are considered as potential candidates for "More-Moore" and "More-than-Moore" applications due to their versatile use as sensors, switches, and actuators. Examples include accelerometers for sensing, RF-MEMS capacitive switches in communicat…
