Micro mechanical systems

Micro mechanical systems: principles and technology

by Fukuda, T., (Toshio) Menz, W., (Wolfgang)

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Title Statements

  • Full title :Micro mechanical systems : principles and technology / edited by T. Fukuda and W. Menz.

Edition Statements

  • Publication Date:1998.

Publication Statements

  • Publisher(s):Elsevier
  • Place of Publication:New-York
  • Language:eng
  • Publication Date:1998.

The Physical Object

  • Description:viii, 268 pages : : illustrations

Edition Identifiers

  • ISBN:0444823638, 9780444823632
  • oclc:ocn301606703
  • LC Classification:TJ163M48 1998
  • Dewey Decimal:621

Table of Contents

1. Introduction / W. Menz -- 2. Photolithographic Microfabrication / M.L. Reed and G.K. Fedder -- 3. Micromachining by Machine Tools / T. Masuzawa -- 4. Tribological Aspects of Microsystems / K.-H. Zum Gahr -- 5. Silicon Microsensors / P.J. French -- 6. Micro-Actuators for Micro-Robots : Electric and Magnetic / R.S. Fearing -- 7. Energy Source and Power Supply Method / F. Arai and T. Fukuda -- 8. Control Method of Micro Mechanical Systems / H. Ishihara and T. Fukuda -- 9. Examples of Microsystems / P. Dario and M.C. Carrozza -- 10. Future Problems / W. Menz.

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Subjects

MEMS Micromachines -- Guides, manuels, etc

Writers

Fukuda, T., (Toshio) Menz, W., (Wolfgang)

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