Micro electro mechanical system design
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Book
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This book provides a unified treatment of all Micro Electro Mechanical System (MEMS) design procedures. The chapters answer important questions such as: What fabrication process do I use? Will this design approach produce a device that can be reliable and have a good yield? What are the packaging and assembly requirements?
Read More ↓Title Statements
- Full title :Micro electro mechanical system design / James J. Allen.
Summary
This book provides a unified treatment of all Micro Electro Mechanical System (MEMS) design procedures. The chapters answer important questions such as: What fabrication process do I use? Will this design approach produce a device that can be reliable and have a good yield? What are the packaging and assembly requirements?
Read More ↓Edition Statements
- Publication Date:2005.
Publication Statements
- Publisher(s):Taylor & Francis
- Place of Publication:Boca Raton
- Language:eng
- Publication Date:2005.
The Physical Object
- Description:465 pages : : illustrations ; : 23 cm.
Edition Identifiers
- ISBN:0824758242, 9780824758240
- oclc:ocm57692765
- LC Classification:TK153
- Dewey Decimal:621
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