Micro and smart systems: technology and modeling
"This first undergraduate-level textbook on microsystems and smart systems makes a burgeoning area of professional practice accessible to course teaching. It is based on a course introduced at VTU in India in 2009, which has already been taught to nearly 1000 students. Practical…
"This first undergraduate-level textbook on microsystems and smart systems makes a burgeoning area of professional practice accessible to course teaching. It is based on a course introduced at VTU in India in 2009, which has already been taught to nearly 1000 students. Practical…
1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Pr…
"Presents the latest methods for designing and fabricating self-powered micro-generators and energy harvester systemsDesign and Fabrication of Self-Powered Micro-Harvesters introduces the latest trends of self-powered generators and energy harvester systems, including the design…
"Presents the latest methods for designing and fabricating self-powered micro-generators and energy harvester systemsDesign and Fabrication of Self-Powered Micro-Harvesters introduces the latest trends of self-powered generators and energy harvester systems, including the design…
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a deta…
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a deta…
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a deta…