Fundamentals of microfabrication and nanotechnology: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology

by Madou, Marc J.

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Title Statements

Full title :Fundamentals of microfabrication and nanotechnology. : Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou

Edition Statements

Publication Date:2009
Edition:3. ed

Publication Statements

Publisher(s):CRC
Place of Publication:Boca Raton, Fla
Language:eng
Publication Date:2009

Notes

Previous ed. published as: Fundamentals of microfabrication. 2002

The Physical Object

Description:xiii, 641 s; 3 bd. : : illustrations

Edition Identifiers

ISBN:9781420055115, 1420055119, 0849331803, 9780849331800
oclc:ocn928931154
Dewey Decimal:621.38152

Subjects

Circuits intégrés -- Conception et cons… Integrated circuits -- Design and const… Lasers -- Applications industrielles Lasers -- Industrial applications machining Microelectromechanical systems -- Desig… microelectronics Microélectronique Miniaturization Usinage