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This book provides a unified treatment of all Micro Electro Mechanical System (MEMS) design procedures. The chapters answer important questions such as: What fabrication process do I use? Will this design approach produce a device that can be reliable and have a good yield? What…
Microelectromechanical systems: advanced materials and fabrication methods
by National Research Council (U.S.)., Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Research Council (U.S.)., National Materials Advisory Board, National Research Council (U.S.)., Commission on Engineering and Technical Systems
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Type: Book
