Micro electro mechanical system design

Micro electro mechanical system design

by Allen, James J.

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Title Statements

  • Full title :Micro electro mechanical system design / James J. Allen.

Edition Statements

  • Publication Date:©2005.

Publication Statements

  • Publisher(s):Taylor & Francis
  • Place of Publication:Boca Raton
  • Language:eng
  • Publication Date:©2005.

The Physical Object

  • Description:465 pages : : illustrations ; : 23 cm

Edition Identifiers

  • ISBN:0824758242, 9780824758240
  • oclc:ocn424137104
  • LC Classification:TK153 A47 2005
  • Dewey Decimal:621

Table of Contents

Ch. 1. Introduction -- Ch. 2. Fabrication processes -- Ch. 3. MEMS technologies -- Ch. 4. Scaling issues for MEMS -- Ch. 5. Design realization tools for MEMS -- Ch. 6. Electromechanics -- Ch. 7. Modeling and design -- Ch. 8. MEMS sensors and actuators -- Ch. 9. Packaging -- Ch. 10. Reliability.

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Subjects

Conception technique Engineering design Microelectromechanical systems -- Desig… Microsystèmes électromécaniques -- Conc… Systèmes microélectromécaniques -- Conc…

Writers

Allen, James J.

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