Micro electro mechanical system design

Micro electro mechanical system design

by Allen, James J.

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Title Statements

  • Full title :Micro electro mechanical system design / James J. Allen.

Edition Statements

  • Publication Date:2005.

Publication Statements

  • Publisher(s):Taylor & Francis
  • Place of Publication:Boca Raton
  • Language:eng
  • Publication Date:2005.

Notes

Formerly CIP.

The Physical Object

  • Description:465 p. : : ill., 1 port. ; : 24 cm.

Edition Identifiers

  • ISBN:0824758242 (hbk), 9780824758240
  • oclc:on1345063801
  • Dewey Decimal:621.381

Subjects

Engineering design Microelectromechanical systems -- Desig…

Writers

Allen, James J.

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