Micro electro mechanical system design

Micro electro mechanical system design

by Allen, James J.

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Title Statements

  • Full title :Micro electro mechanical system design / JAmes J. Allen.

Edition Statements

  • Publication Date:2005.

Publication Statements

  • Publisher(s):Marcel Dekker
  • Place of Publication:New York
  • Language:eng
  • Publication Date:2005.

The Physical Object

  • Description:300 pages

Edition Identifiers

  • ISBN:0824758242, 9780824758240
  • oclc:ocm57484518
  • Dewey Decimal:621.3/81

Subjects

Microelectromechanical systems -- Desig…

Writers

Allen, James J.

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