Handbook of silicon based MEMS

Handbook of silicon based MEMS: materials & technologies

by Lindroos, Veikko

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Title Statements

  • Full title :Handbook of silicon based MEMS : materials & technologies / edited by Veikko Lindroos [and five others].

Edition Statements

  • Publication Date:2015.
  • Edition:Second edition

Publication Statements

  • Publisher(s):William Andrew
  • Place of Publication:Norwich
  • Language:eng
  • Publication Date:2015.

Notes

Previous edition: 2009.

The Physical Object

  • Description:1 volume ; : 28 cm

Edition Identifiers

  • ISBN:9780323299657, 0323299652
  • oclc:on1061808308
  • Dewey Decimal:621.38152

Subjects

Micro-Electrical-Mechanical Systems Microelectromechanical systems Microelectromechanical systems -- Mater… Microsystèmes électromécaniques Microsystèmes électromécaniques -- Maté… Silicon -- Electric properties

Writers

Lindroos, Veikko

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