High density plasma sources

High density plasma sources: design, physics, and performance

by Popov, Oleg A.

Type Book
Rate 0.0 /5
Details
Files
Reviews
Download

Title Statements

  • Full title :High density plasma sources : design, physics, and performance / edited by Oleg A. Popov.

Edition Statements

  • Publication Date:©1995.

Publication Statements

  • Publisher(s):Noyes Publications
  • Place of Publication:Park Ridge, N.J
  • Language:eng
  • Publication Date:©1995.

The Physical Object

  • Description:1 ressource en ligne (xx, 445 pages) : : illustrations

Edition Identifiers

  • ISBN:1591240638, 9781591240631
  • oclc:ocn301074454
  • LC Classification:QC718.5.D4
  • Dewey Decimal:530.4/42

Subjects

Bibvir e-books Générateurs de plasma High temperature plasmas Livres numériques Plasma (Gaz ionisés) -- Densité Plasma density Plasma generators Plasmas chauds Ressources Internet

Writers

Popov, Oleg A.

More from this Series

  • Handbook of VLSI microlithography

    ©2001.
    more →
    Handbook of VLSI microlithography

  • Handbook of VLSI microlithography

    2001.
    more →
    Handbook of VLSI microlithography

  • Handbook of VLSI microlithography

    2001.
    more →
    Handbook of VLSI microlithography

  • Handbook of VLSI microlithography

    2001.
    more →
    Handbook of VLSI microlithography

  • Handbook of VLSI microlithography

    ©2001.
    more →
    Handbook of VLSI microlithography

Rate & Review

0.0/5
(0 people Voted)

No reviews yet. Be the first to rate this work.

Files & Downloads

  • High density plasma sources : design, physics, an…

    PDF · 15.6 MB · updated
    Login →
Log in to request a copy