This edition encompasses the area of high-frequency applicators and probes for material interactions as an integrated science. Based on practical experience rather than entirely on theoretical concepts, and emphasizing phenomenological explanations and well-annotated figures, th…
This edition encompasses the area of high-frequency applicators and probes for material interactions as an integrated science. Based on practical experience rather than entirely on theoretical concepts, and emphasizing phenomenological explanations and well-annotated figures, th…
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition…
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition…