High density plasma sources

High density plasma sources: design, physics, and performance

by Popov, Oleg A.

Type Book
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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma process…

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Title Statements

  • Full title :High density plasma sources : design, physics, and performance / edited by Oleg A. Popov.

Summary

This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing.

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Edition Statements

  • Publication Date:©1995.

Publication Statements

  • Publisher(s):Noyes Publications
  • Place of Publication:Park Ridge, N.J
  • Language:eng
  • Publication Date:©1995.

The Physical Object

  • Description:1 online resource (xx, 445 pages) : : illustrations

Edition Identifiers

  • ISBN:1591240638, 9781591240631, 9780815513773, 0815513771, 9780080946160, 008094616X, 9780815517887, 0815517882, 1282755080, 9781282755086, 9786612755088, 6612755083, 1282253212, 9781282253216, 9786612253218, 6612253215, 0815517890, 9780815517894
  • oclc:ocm49708645
  • LC Classification:QC718.5.D4
  • Dewey Decimal:530.4/42

Table of Contents

Helicon Plasma Sources -- Planar Inductive Sources -- Electrostatically-Shielded Inductively-Coupled RF Plasma Sources -- Very High Frequency Capacitive Plasma Sources -- Surface Wave Plasma Sources -- Microwave Plasma Disk Processing Machines -- Electron Cyclotron Resonance Plasma Sources -- Distributed ECR Plasma Sources -- References -- Index.

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Subjects

Générateurs de plasma High temperature plasmas Plasma (Gaz ionisés) -- Densité Plasma density Plasma generators Plasmas chauds TECHNOLOGY & ENGINEERING -- Mechanical

Writers

Popov, Oleg A.

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