Materials and process characterization

Materials and process characterization

by Einspruch, Norman G. Larrabee, Graydon B.

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Title Statements

  • Full title :Materials and process characterization / edited by Norman G. Einspruch, Graydon B. Larrabee.

Edition Statements

  • Publication Date:1983.

Publication Statements

  • Publisher(s):Academic Press
  • Place of Publication:New York
  • Language:eng
  • Publication Date:1983.

The Physical Object

  • Description:xii, 601 pages : : illustrations ; : 24 cm

Edition Identifiers

  • ISBN:0122341066, 9780122341069
  • oclc:ocm10947665
  • LC Classification:TK7874

Subjects

Circuits intégrés à très grande échelle Integrated circuits -- Very large scale… Microelectronics -- Materials Microélectronique -- Matériaux Production engineering Technique de la production

Writers

Einspruch, Norman G. Larrabee, Graydon B.

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