MEMS Cost Analysis: From Laboratory to Industry

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The World of MEMS; Chapter 2: Basic Fabrication Processes; Chapter 3: Surface Microengineering. High Aspect Ratio Microengineering; Chapter 5: MEMS Testing; Chapter 6: MEMS Packaging. Clean Rooms, Buildings and Plant; Chapter 8: The MEMSCOST Spreadsheet; Chapter 9: Product Costs - Accelerometers. Product Costs - Microphones. MEMS Foundries. Financial Reporting and Analysis. Conclusions.

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Title Statements

Full title :MEMS Cost Analysis : From Laboratory to Industry.

Summary

Edition Statements

Publication Date:©2013.
Edition:1st ed

Publication Statements

Publisher(s):Pan Stanford Publishing
Place of Publication:Singapore
Language:eng
Publication Date:©2013.

The Physical Object

Description:1 online resource (300 pages)

Edition Identifiers

ISBN:9789814411073, 9814411078
oclc:on1058318331
LC Classification:TK7875
Dewey Decimal:621.381

Front Cover -- Contents -- Preface -- Acknowledgements -- Chapter 1 The World of MEMS -- Chapter 2 Basic Fabrication Processes -- Chapter 3 Surface Micromachining -- Chapter 4 High-Aspect-Ratio Micromachining -- Chapter 5 MEMS Testing -- Chapter 6 MEMS Packaging -- Chapter 7 Clean Rooms, Buildings and Plant -- Chapter 8 The MEMSCOST Spreadsheet -- Chapter 9 Product Costs: Accelerometers -- Chapter 10 Product Costs: Microphones -- Chapter 11 MEMS Foundries -- Chapter 12 Financial Reporting and Analysis -- Chapter 13 Conclusions -- Back Cover.