Micro electro mechanical system design

Micro electro mechanical system design

by Allen, James J.

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Title Statements

  • Full title :Micro electro mechanical system design / James J. Allen.

Summary

Annotation

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Edition Statements

  • Publication Date:2005.

Publication Statements

  • Publisher(s):Taylor & Francis
  • Place of Publication:Boca Raton
  • Language:eng
  • Publication Date:2005.

The Physical Object

  • Description:1 online resource (465 pages) : : illustrations

Edition Identifiers

  • ISBN:0824758242, 9780824758240, 1420027751, 9781420027754
  • DOI:10.1201/9781420027754
  • oclc:ocn309876067
  • LC Classification:TK153
  • Dewey Decimal:621

Table of Contents

Chapter 1 Chapter 1 -- chapter 2 Chapter 2 -- chapter 3 Chapter 3 -- chapter 4 Chapter 4 -- chapter 5 Chapter 5 -- chapter 6 Chapter 6 -- chapter 7 Chapter 7 -- chapter 8 Chapter 8 -- chapter 9 Chapter 9 -- chapter 10 Chapter 10.

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Subjects

Conception technique Engineering design Microelectromechanical systems -- Desig… TECHNOLOGY & ENGINEERING -- Mechanical

Writers

Allen, James J.

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