Microelectromechanical Systems: Advanced Materials and Fabrication Methods

by Staff, National Research Council

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Title Statements

Full title :Microelectromechanical Systems : Advanced Materials and Fabrication Methods.

Edition Statements

Publication Date:1997.

Publication Statements

Publisher(s):National Academies Press
Place of Publication:Washington
Language:eng
Publication Date:1997.

Notes

""Failure analysis""

The Physical Object

Description:1 online resource (76 pages)

Edition Identifiers

ISBN:9780309591515, 0309591511, 9780309059800, 0309059801
oclc:ocn923260667
LC Classification:TK7874.N333 1997eb
Dewey Decimal:621.381

""Microelectromechanical Systems""; ""Copyright""; ""Acknowledgments""; ""Preface""; ""Contents""; ""Acronyms""; ""Executive Summary""; ""LEVERAGING AND EXTENDING THE INTEGRATED CIRCUITS FOUNDATION""; ""ENLARGING THE SUITE OF MATERIALS SUITABLE FOR INTEGRATED-CIRCUIT-LIKE PROCESSING""; ""CHARACTERIZING MEMS MATERIALS""; ""UNDERSTANDING SURFACE AND INTERFACE EFFECTS""; ""ETCHING TECHNOLOGIES""; ""ESTABLISHING STANDARD TEST DEVICES AND METHODS""; ""MEMS PACKAGING""; ""FOUNDRY AND COMPUTER-AIDED DESIGN INFRASTRUCTURE FOR MEMS""; ""ACADEMIC STRUCTURE TO SUPPORT MEMS""; ""1 Background""

""COMMERCIAL SUCCESSES""""Thermal Ink-Jet Printing""; ""Accelerometers""; ""NEWLY INTRODUCED PRODUCTS""; ""High-Resolution Displays""; ""Chemical-Sensing Arrays""; ""LONGER-RANGE OPPORTUNITIES""; ""Transportation""; ""Biomedical and Health Care""; ""Information Technology""; ""Defense""; ""SUMMARY""; ""2 Integrated Circuit-Based Fabrication Technologies and Materials""; ""STRENGTHS OF THE INTEGRATED CIRCUIT PROCESS""; ""USING EXISTING INTEGRATED CIRCUIT-BASED PROCESSES""; ""Bulk Micromachining Processes""; ""Bulk Micromachining for MEMS with Electronics""; ""Surface Micromachining Processes""

""Surfac…