Microlithography

Microlithography: science and technology

by Smith, Bruce W. Suzuki, Kazuaki

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Title Statements

  • Full title :Microlithography : science and technology / edited by Kazuaki Suzuki and Bruce W. Smith.

Edition Statements

  • Publication Date:2013.
  • Edition:3rd ed

Publication Statements

The Physical Object

  • Description:pages

Edition Identifiers

  • ISBN:9781439876756, 1439876754
  • oclc:ocn815365405
  • Dewey Decimal:621.381531

Subjects

Circuits intégrés -- Masques Fabrication Integrated circuits / Masks manufacturing Manufacturing processes Metal oxide semiconductors, Complementa… Microlithographie -- Applications indus… Microlithography -- Industrial applicat…

Writers

Smith, Bruce W. Suzuki, Kazuaki

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