Microsystems and nanotechnology

Microsystems and nanotechnology

by Lin, Liwei Wang, Zhonglin Zhou, Zhaoying

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Title Statements

  • Full title :Microsystems and nanotechnology / Zhaoying Zhou ...

Edition Statements

  • Publication Date:2012

Publication Statements

Notes

Literaturangaben

The Physical Object

  • Description:XXII, 1004 S. : Ill., graph. Darst. : 24 cm

Edition Identifiers

  • ISBN:9787302243076, 7302243077, 9783642182921, 3642182925
  • oclc:ocn800426765
  • LC Classification:TK
  • Dewey Decimal:621

Subjects

(Keywords)MEMs (Keywords)microtechnology (Keywords)nanoscience (Produktform)Hardback (Zielgruppe)Research Mikrosystemtechnik Nanotechnologie

Writers

Lin, Liwei Wang, Zhonglin Zhou, Zhaoying

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