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(Keywords)microtechnology

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(Keywords)microtechnology

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Microsystems and nanotechnology

Microsystems and nanotechnology

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(Keywords)MEMs (1) (Keywords)microtechnology (1) (Keywords)nanoscience (1) (Produktform)Hardback (1) (Zielgruppe)Research (1) Mikrosystemtechnik (1) Nanotechnologie (1)

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Springer (1) Tsinghua Univ. Press (1)

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2012 (1)

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