Nanoimprinting and Its Applications

by Miyauchi, Akihiro

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Title Statements

Full title :Nanoimprinting and Its Applications

Edition Statements

Publication Date:2019.

Publication Statements

Publisher(s):Pan Stanford Publishing
Place of Publication:Milton
Language:eng
Publication Date:2019.

Notes

8.4.1 Impact on the Critical Stresses P[sub(s)] and P[sub(n)]

The Physical Object

Description:1 online resource (210 pages)

Edition Identifiers

ISBN:9780429628511, 042962851X, 9780429626876, 0429626878, 9780429625237, 0429625235, 9780429031922, 0429031920
DOI:10.1201/9780429031922
oclc:on1107583176
Dewey Decimal:621.38153

Cover; Half Title; Title Page; Copyright Page; Contents; Preface; 1. Introduction; 1.1 Background; 1.2 Principle of Nanoimprinting; 1.3 Applications; 2. Template Technology; 2.1 Template Fabrication; 2.1.1 Photolithography; 2.1.2 Self-Organization by a Block Copolymer; 2.1.3 Self-Organization by Anodic Oxidation; 2.1.4 Interference Exposure; 2.2 Release Process; 2.2.1 Release Layer; 2.2.2 Degradation of the Release Layer; 2.2.3 Recovery of the Release Layer; 3. Thermal Nanoimprinting; 3.1 Process; 3.2 Resin Materials; 3.3 Molds; 3.4 Equipment

3.5 Example of Thermal Nanoimprinting: Sheet Nanoimprinting3.5.1 Experimental; 3.5.2 Results and Analysis; 4. Photonanoimprinting; 4.1 Process; 4.2 Materials; 4.2.1 UV-Curable Resin; 4.2.2 Coupling Treatment; 4.3 Molds; 4.3.1 Glass Mold; 4.3.2 Soft Mold; 4.4 Equipment; 4.4.1 Parallel Press; 4.4.2 Roll Press; 4.5 Example of Photonanoimprinting; 4.5.1 Process Sequence; 4.5.2 Soft Mold; 4.5.3 Coupling Treatment Process; 4.5.4 Dry Etching of Aluminum; Appendix A: Fidelity of a Soft Mold; Appendix B: Resin Viscosity in Nanospace; Appendix C: Restriction of Air Bubbles

5. Room-Temperature Nanoimprinting5.1 Introduction; 5.2 RT-NILUsing a PDMS Mol…