Nanoimprinting and its applications
Nanoimprinting has grown rapidly since it was proposed in 1995 by Prof. Chou. Now machines, resins, and molds for nanoimprinting are commercially available worldwide. The application fields of nanoimprinting are expanding to not only electronics but also optics, biology, and energy because nanoimprinting is a simple and convenient method for nanofabrication, and some devices are now being mass-produced. In the near future, the application of nanoimprinting in display and semiconductor fields is…
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- Full title :Nanoimprinting and its applications / edited by Akihiro Miyauchi.
Summary
Nanoimprinting has grown rapidly since it was proposed in 1995 by Prof. Chou. Now machines, resins, and molds for nanoimprinting are commercially available worldwide. The application fields of nanoimprinting are expanding to not only electronics but also optics, biology, and energy because nanoimprinting is a simple and convenient method for nanofabrication, and some devices are now being mass-produced. In the near future, the application of nanoimprinting in display and semiconductor fields is expected. This book explains the fundamentals of nanoimprinting in terms of materials, processes, and machines. It also describes the applications of nanoimprinting in optics, biology, energy, and electronics. In addition, it includes as many practical examples of nanoimprinting as possible. The fundamentals will help advanced undergraduate and graduate students understand nanoimprinting. The examples will be useful for both researchers working in nanoimprinting for the first time and engineers involved in research and development of various devices using nanostructures.
Read More ↓Edition Statements
- Publication Date:©2019
Publication Statements
- Publisher(s):Jenny Stanford Publishing
- Place of Publication:Singapore
- Language:eng
- Publication Date:©2019
The Physical Object
- Description:1 online resource
Edition Identifiers
- ISBN:9780429031922, 0429031920, 9780429628511, 042962851X, 9780429625237, 0429625235, 9780429626876, 0429626878
- oclc:on1104839807
- LC Classification:TK7874.843
- Dewey Decimal:621.38153
Table of Contents
Introduction -- Template technology -- Thermal nanoimprinting -- Photonanoimprinting -- Room-temperature nanoimprinting -- Basic mechanisms of nanoimprint lithography -- UV nanoimprint lithography process -- Demolding process simulation -- Measurement and analysis methods in nanoimprinting -- Applications -- Index.
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