Resonant MEMS

Resonant MEMS: Fundamentals, Implementation and Application

by Brand, Oliver Dufour, Isabelle Heinrich, Stephen M. Josse, Fabien

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Title Statements

  • Full title :Resonant MEMS : Fundamentals, Implementation and Application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich, and Fabien Josse.

Edition Statements

  • Publication Date:2015

Publication Statements

  • Publisher(s):Wiley-VCH
  • Place of Publication:Weinheim, Germany
  • Language:eng
  • Publication Date:2015

The Physical Object

  • Description:xxv, 483 p. : : il. ; : 26 cm

Edition Identifiers

  • ISBN:9783527335459, 3527335455, 9783527676361, 3527676368, 9783527676354, 352767635X, 9783527676347, 3527676341, 9783527676330, 3527676333
  • oclc:on1120439654
  • LC Classification:TK7875

Subjects

Sistemes microelectromecànics

Writers

Brand, Oliver Dufour, Isabelle Heinrich, Stephen M. Josse, Fabien

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