Resonant MEMS: Principles, Modeling, Implementation and Applications

Title Statements

• Full title :Resonant MEMS. : Principles, Modeling, Implementation and Applications.

Edition Statements

• Publication Date:2015.

Publication Statements

• Publisher(s):Wiley-VCH
• Place of Publication:Weinheim
• Language:eng
• Publication Date:2015.

The Physical Object

• Description:512 pages ; : 25 x 17 cm.

Edition Identifiers

• ISBN:9783527335459, 3527335455
• oclc:ocn919320150
• LC Classification:TK7875
• Dewey Decimal:620.5

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