Secondary ion mass spectrometry: applications for depth profiling and surface characterization

by Stevie, F. A.

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Title Statements

Full title :Secondary ion mass spectrometry : applications for depth profiling and surface characterization / Fred A. Stevie.

Summary

Secondary ion mass spectrometry (SIMS) is a mass spectrometric technique for solid materials that can provide elemental analysis at parts per million sensitivity and lateral resolution of 50 nm. When those capabilities are combined with the ability to provide that analysis as a function of depth, SIMS has proved to be a valued technique for a wide range of applications. This book was written to explain a technique that requires an understanding of many details in order to properly obtain and interpret the data. It also will serve as a reference for those who need to provide SIMS data. The book has over 200 figures and the references allow one to trace the development of SIMS and help understand the technique.

Edition Statements

Publication Date:©2016

Publication Statements

Publisher(s):Momentum Press
Place of Publication:New York, NY
Language:eng
Publication Date:©2016

The Physical Object

Description:1 online resource (1 volume) : : illustrations.

Edition Identifiers

ISBN:9781606505892, 1606505890
oclc:ocn927113085
LC Classification:QD96.S43
Dewey Decimal:543.0873

1. Comparison of surface analytical techniques -- 1.1 Common elemental surface analysis techniques -- 1.2 Introduction to mass spectrometry -- 1.3 Brief history of mass spectrometry and SIMS -- 1.4 Types of mass spectrometry -- 1.5 Rationale for SIMS -- 1.6 Types of SIMS data -- References