Silicon processing for the VLSI era

Silicon processing for the VLSI era

by Wolf, Stanley

Type Book
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Title Statements

  • Full title :Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.

Edition Statements

  • Publication Date:©1990 - c2002.
  • Edition:2nd ed

Publication Statements

  • Publisher(s):Lattice Press
  • Place of Publication:Sunset Beach
  • Language:eng
  • Publication Date:©1990 - c2002.

The Physical Object

  • Description:4 volumes : : illustrations ; : 24 cm

Edition Identifiers

  • ISBN:0961672145, 9780961672140, 0961672161, 9780961672164, 0961672153, 9780961672157, 096167217X, 9780961672171
  • oclc:ocn769025239
  • LC Classification:TK7874
  • Dewey Decimal:621.381/73

Subjects

Academic Dissertation Academic theses Circuits intégrés à très grande échelle Integrated circuits -- Very large scale… Semi-conducteurs -- Attaque chimique Semiconductors -- Etching Silicium Silicon Thèses et écrits académiques

Writers

Wolf, Stanley Tauber, Richard N.

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