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An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.
This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical li…
This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical li…
This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical li…
Preface -- Chapter 1. Introducing optical lithography. 1.1. The role of lithography in integrated circuit fabrication -- 1.2. The goal of lithography -- 1.3. The metrics of lithography -- 1.4. The contents of this book. Chapter 2 Exposure systems. 2.1. Proximity printing -- 2.2…