Title Statements
- Full title :Silicon wet bulk micromachining for mems.
Edition Statements
- Publication Date:2017
Publication Statements
- Publisher(s):Pan Stanford Publishing Pte Lt
- Language:eng
- Publication Date:2017
The Physical Object
- Description:424 sidor ; : 23.5 cm
Edition Identifiers
- ISBN:9789814613729, 981461372X
- oclc:on1023251169
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