1. A brief introduction of the crystal structure -- 2. Brief overview of silicon wafer manufacturing and microfabrication techniques -- 3. Isotropic etching of silicon and related materials -- 4. KOH-based anisotropic etching -- 5. TMAH-based anisotropic etching -- 6. Convex and…
Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical--based silicon bulk micromachini…
During the rapid growth period of the Japanese economy, from the mid-1950s to the mid-1970s, the economic system that became entrenched in Japan -- the so-called Japanese-style capitalism -- was based on the government-business-bureaucracy triad. Although its distinct features s…
During the rapid growth period of the Japanese economy, from the mid-1950s to the mid-1970s, the economic system that became entrenched in Japan -- the so-called Japanese-style capitalism -- was based on the government-business-bureaucracy triad. Although its distinct features s…