Spectroscopic ellipsometry: practical application to thin film characterization

by Tompkins, Harland G.

Type Book

Rate 0.0 /5

Details

Files

Reviews

Download

Title Statements

Full title :Spectroscopic ellipsometry : practical application to thin film characterization / Harland G. Tompkins and James N. Hilfiker.

Summary

Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from subnanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. It follows in the footsteps of two previous books written by one of the authors with important updates to emphasize modern instrumentation and applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.

Edition Statements

Publication Date:2016.

Publication Statements

Publisher(s):Momentum Press
Place of Publication:New York [New York] (222 East 46th Street, New York, NY 10017)
Language:eng
Publication Date:2016.

Notes

Title from PDF title page (viewed on January 27, 2016).

The Physical Object

Description:1 online resource (1 PDF (xxiii, 159 pages)) : : illustrations

Edition Identifiers

ISBN:9781606507285, 1606507281
oclc:ocn936210041
LC Classification:QC443
Dewey Decimal:620.11295

1. Perspective, previous works, and purpose of this volume -- 1.1 Historical aspects -- 1.2 Focus of this book and target audience -- 1.3 Overview of topics.

2. Basic physical phenomena -- 2.1 The electromagnetic wave -- 2.2 Interactions between the electromagnetic wave and matter -- 2.3 Laws of reflection and refraction -- 2.4 Polarized light -- 2.5 The reflection and transmission of light -- 2.6 Measurement quantities.

3. Spectroscopic ellipsometry components and instrumentation -- 3.1 Components of a spectroscopic ellipsometer -- 3.2 Spectroscopic ellipsometers.

4. General data features -- 4.1 Spectra for substrates -- 4.2 Spectra for films on a substrate.

5. Representing optical functions -- 5.1 Tabulated list -- 5.2 Dispersion equations -- 5.3 The Cauchy equation, a dispersion equation for transparent regions -- 5.4 Oscillator models -- 5.5 B-spline.

6. Optical data analysis -- 6.1 Direct calculation: pseudo-optical constants -- 6.2 Data analysis, the problem -- 6.3 Data analysis, the approach.

7. Transparent thin films -- 7.1 Data features of transparent films -- 7.2 Fitting a transparent film with known index -- 7.3 Fitting a transparent film with an unknown index -- …

Subjects

Cauchy equation dispersion equations Ellipsométrie Ellipsometry Optical constants polarized light refractive index Spectrum analysis -- Measurement TECHNOLOGY & ENGINEERING -- Engineering… TECHNOLOGY & ENGINEERING -- Reference thin film thickness Thin films -- Measurement