ULSI semiconductor technology atlas
by Lu, Chih-Yuan Sheng, George T. T. Tung, Chih-Hang
Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.
Read More ↓Title Statements
- Full title :ULSI semiconductor technology atlas / Chih-Hang Tung, George T.T. Sheng, Chih-Yuan Lu.
Summary
Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.
Read More ↓Edition Statements
- Publication Date:2003.
Publication Statements
- Publisher(s):Wiley
- Place of Publication:Hoboken
- Language:eng
- Publication Date:2003.
The Physical Object
- Description:Online-Ressource
Edition Identifiers
- ISBN:0471457728, 9780471457725, 9780471668794, 0471668796
- DOI:10.1002/0471668796
- oclc:ocn850811574
- LC Classification:TK7874.76
- Dewey Decimal:621.395
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