ULSI semiconductor technology atlas
by Tung, Chih-Hang, Sheng, George T. T., Lu, Chih-Yuan
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Type: Book
Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustr…