VLSI metallization

VLSI metallization

by Cohen, Simon S. Einspruch, Norman G. Gildeblant, Gennady Sh

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Title Statements

  • Full title :VLSI metallization / edited by Norman G. Einspruch, Simon S. Cohen, Gennady Sh. Gildeblant.

Edition Statements

  • Publication Date:1987.

Publication Statements

  • Publisher(s):Academic Press
  • Place of Publication:Orlando, FL
  • Language:eng
  • Publication Date:1987.

The Physical Object

  • Description:x, 480 p. : : il., gràf. ; : 24 cm

Edition Identifiers

  • ISBN:0122341155, 9780122341151
  • oclc:ocn802943338

Subjects

Circuits integrats -- VLSI

Writers

Cohen, Simon S. Einspruch, Norman G. Gildeblant, Gennady Sh

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