VLSI technology

VLSI technology

by Sze, S. M.

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Title Statements

  • Full title :VLSI technology / edited by S.M. Sze.

Edition Statements

  • Publication Date:©1983.

Publication Statements

  • Publisher(s):McGraw-Hill
  • Place of Publication:New York
  • Language:eng
  • Publication Date:©1983.

The Physical Object

  • Description:xiv, 654 pages : : illustrations ; : 24 cm

Edition Identifiers

  • ISBN:0070626863, 9780070626867
  • oclc:ocm09133580
  • LC Classification:TK7874
  • Dewey Decimal:621.381/73

Table of Contents

P.1. Crystal growth and water preparation -- P.2. Epitaxy -- P.3. Dielectric and polysilicon film deposition -- P.4. Oxidation -- P.5. Diffusion -- P.6. Ion implantation -- P.7. Lithography -- P.8. Dry etching -- P.9. Metallization -- P.10. Process simulation -- P.11. VLSI process integration -- P.12. Diagnostic techniques -- P.13. Assembly techniques and packaging -- P.14. Yield and reliability.

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Subjects

Circuits intégrés à très grande échelle Integrated circuits Integrated circuits -- Very large scale… Microélectronique VLSI

Writers

Sze, S. M.

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