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Introduction to microlithography. Based on a workshop sponsored by the ACS division of organic coatings and p…: American chemical society. Meeting 185. Workshop …
by Bowden, M. J., American Chemical Society., Division of Organic Coatings and Plastics Chemistry, Thompson, L. F., Willson, C. G., ACS
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Type: Book
Introduction to microlithography: theory, materials, and processing
by Bowden, M. J., American Chemical Society., Division of Organic Coatings and Plastics Chemistry, American Chemical Society., Meeting, Seattle, Wash.), Thompson, L. F., Willson, C. G., (C. Grant)
fromACS symposium series (En ligne)
0
Type: Book