Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including sur…
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Kennedy, Joseph P., Henrici-Olivé, G., (Gisela), Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Olivé, S., (Salvador), Schulz, Günter Victor, Stille, John K., Oveberger, Charles G.
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Kennedy, Joseph P., Henrici-Olivé, G., (Gisela), Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Kausch, Hans-Henning, Olivé, S., (Salvador), Overberger, Charles G., Ringsdorf, Helmut, Schulz, Günter Victor, Stille, John K.
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Kennedy, Joseph P., Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Overberger, Charles G., Stille, John K., Schulz, Gıter Victor
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Okamura, S., (Seizō), Dall'Asta, Gino, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Overberger, Charles G., Stille, John K., Natta, Giulio, Prins, Willem, Schulz, Günter V., Staverman, Albert Jan
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Kennedy, Joseph P., Henrici-Olivé, G., (Gisela), Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Olivé, S., (Salvador), Overberger, Charles G., Stille, John K., Schulz, Güunther Victor, Heublein, Habil G., Höocker, H.
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Kennedy, Joseph P., Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Overberger, Charles G., Schulz, Günter Victor, Stille, John K.
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Kennedy, Joseph P., Henrici-Olivé, G., (Gisela), Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Olivé, S., (Salvador), Schulz, Günter Victor, Stille, John K., Oveberger, Charles G.
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Kennedy, Joseph P., Henrici-Olivé, G., (Gisela), Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Olivé, S., (Salvador), Overberger, Charles G., Schulz, Günter Victor, Stille, John K.
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Kennedy, Joseph P., Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Overberger, Charles G., Schulz, Günter Victor, Stille, John K., Slichter, Willam P.
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Okamura, S., (Seizō), Dall'Asta, Gino, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Overberger, Charles G., Schulz, Günter Victor, Stille, John K., Natta, Giulio, Staverman, Albert Jan
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Overberger, Charles G., Schulz, Günter Victor, Stille, John K.
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Slichter, William P., Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Overberger, Charles G., Stille, John K., Natta, Giulio, Schulz, Günther Victor
fromAdvances in polymer science
by Kern, Werner, Cantow, Hans-Joachim, Okamura, S., (Seizō), Saegusa, Takeo, Dall'Asta, Gino, Dušek, Karel, Ferry, John, (John D.), Fujita, Hiroshi, Gordon, M., (Manfred), Overberger, Charles G., Schulz, Günter Victor, Stille, John K., Natta, Giulio, Slichter, Willam P.
fromAdvances in polymer science
Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.--[Source inconnue].
