Silicon-on-Insulator (SOI) technology is widely used in high-performance and low-power semiconductor devices. The SOI wafers have two layers of active silicon (Si), and normally the bottom Si layer is a mere physical structure. The idea of making intelligent pixel detectors by u…
Silicon-on-Insulator (SOI) technology is widely used in high-performance and low-power semiconductor devices. The SOI wafers have two layers of active silicon (Si), and normally the bottom Si layer is a mere physical structure. The idea of making intelligent pixel detectors by u…
2. Major issues in SOI pixel detector -- 2.1 Back-gate effect -- 2.2 Crosstalk between sensors and circuits -- 2.3 Leakage current -- 2.4 High-resistivity wafer -- 2.5 Radiation hardness. 3. Basic SOI pixel process -- 3.1 Advantages of SOI structure -- 3.2 FD-SOI radiation sens…
Silicon-on-Insulator (SOI) technology is widely used in high-performance and low-power semiconductor devices. The SOI wafers have two layers of active silicon (Si), and normally the bottom Si layer is a mere physical structure. The idea of making intelligent pixel detectors by u…